Equipment to get vacuum by continous supplying Nitrogen or Air
Equipment to get vacuum by continous supplying Nitrogen or Air (hearinafter called working gas).
It is used as generator of vacuum in purging used remain gas or atomoshere inside piping.
Body integrated vacuum generating function
Suppying connection of working gases
Discharged connection
Vacuum connection
| Supplying pressure of working gases | 0.5MPa | ||||
| Flowrate | around 30L/min(nor) | ||||
| Achieved vacuum | Less -76KPa(18cmHg) | ||||
| Model | TE-140 series | TE-140A | |||
| Connection | In | 1/4”VCR or UJR | 1/4”VCR | ||
| Blow | 3/8”VCR or UJR | 3/8”VCR | |||
| Vacuum | 1/4”VCR or UJR | 1/4”VCR | |||
| Material | SUS316 | ||||
| Leakage (He leak) | Less 1.3×10-10Pa・m3/sec | ||||
1,Connect each connestion. In case that vacuumed gas is dangerous, the safety device for discharing the gas is required.
2,Supply the working gas to suppkying connection
3,Start absorbing from the vacuum connecion and get vacuum in connecting piping or device.