Equipment for Semiconductor use

Vacuum Generator

Vacuum Generator

Equipment to get vacuum by continous supplying Nitrogen or Air

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V・Gバキューム・ジェネレータ
Features

Equipment to get vacuum by continous supplying Nitrogen or Air (hearinafter called working gas).
It is used as generator of vacuum in purging used remain gas or atomoshere inside piping.

Construction

Body integrated vacuum generating function
Suppying connection of working gases
Discharged connection
Vacuum connection

Specification
Supplying pressure of working gases 0.5MPa
Flowrate around 30L/min(nor)
Achieved vacuum Less -76KPa(18cmHg)
Model TE-140 series TE-140A
Connection In 1/4”VCR or UJR 1/4”VCR
Blow 3/8”VCR or UJR 3/8”VCR
Vacuum 1/4”VCR or UJR 1/4”VCR
Material SUS316
Leakage (He leak) Less 1.3×10-10Pa・m3/sec
How to use

1,Connect each connestion. In case that vacuumed gas is dangerous, the safety device for discharing the gas is required.
2,Supply the working gas to suppkying connection
3,Start absorbing from the vacuum connecion and get vacuum in connecting piping or device.

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