Equipment for Semiconductor use

Pressure Switch

Pressure Switch

Suitable for pressure alarm of electronics material gas line. A variety models for high precision and portable light weight and from high pressure and low pressure

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Features

Material : SUS316L and SUS316
Leakage : Guaranteed He-leak less than 1.3×10－10Pa・m3/sec by welded connections.
Small size and light weight
Setting pressure is changeable.
Option : EP for materials in contact with media

Application

Suitable for pressure alarm and pressuree control of electronics material gases or analysis gases required high purity,ultra clean and low leakage.

Cord color
Cord color Black White Red
Mode C（common terminal） NO（normal open） NC（normal close）
Specification
Model Setting pressure range Using upper limit presure (Mpa) Repeat accuracy
MPa		 Working deviation
MPa		 Other specification
Upper limit (Mpa) Lower limit (Mpa)
TPS-E1 -0.076~
+0.034		 -0.096~
+0.014		 0.5 ±0.006 around 0.02 1) Current capacity : 5A－125VAC
2) Life time : 100,000 times
3) Connection : 1/4" UJR Female, 1/4" UJR Male or others
4) Surrounding temperature : －15～65℃(60％RH)
5) EP products (Option)
6) Cord length : About 300mm
TPS-E2 0.04
~ 0.25		 0.02~0.23 2 ±0.007 around 0.02
TPS-E3 0.24 ~ 1.2 0.12~1.08 3 ±0.036 around 0.12
TPS-E4 0.8~4 0.4~3.6 5 ±0.12 around 0.4
TPS-E5 1~5 0.5~4.5 16.5 ±0.15 around 0.5

 

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