Equipment for Semiconductor use

Pressure Gauge

Pressure Gauge
Suitable for clean circumstances
Down Load
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Features

Manufactured under severe quality control and clean room.
Tested all numbers by He-leak testing
Model to use Ni-Cr-Mo alloy for contact with media is also available for corrsive gas.

Specification
Material Case SUS304
Contact with media
(Bourdon tube, stem)		 SUS316L
Others SUS304,A1070P
Connection 9/16-18UNF NPT1/4
Leakage (He leak)
Less Pa・m3/sec		 1.3x10-11 1.3x10-9
Surface finish Non-EP
or
Ra 0.25μm		 Non-EP
Accuracy JIS1.6 class(JIS　B7505)
Using temperature －5 - 40℃
Option

Materials in contact with media : Ni-Cr-Mo alloy
*Suraface finish : Ra 0.25μm only

Pressure gauge for high-purity gases

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Features

Assembled in clean room.
Suitable for electro material gases
Usable for corrosive gases because material in contact with medial is SUS316L.
Various models to satify customer's requirement
Tested all numbers by He-leak under severe quality control.

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