Equipment for Semiconductor use
High purity regulator
A variety of models from high pressure to very low pressure and for semiconductor and LCD gases.
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[Model Line-up]
TORR Regulator
Models applying high-corrosion-resistance alloy, Ni-Cr-Mo alloy (Hastelloy) to primary metallic parts contacting with gas are available for use in corrosive gases.
S-TORR Regulator
This is a model for super high-purity gas piping use, securing gas purity retaining performance and safety to the utmost limit. Models for special uses are available, such as models for strong corrosive gas, negative pressure control, and tied diaphragm type.
For inlet low-pressure gases
| BA | TORR‐30 series 1/4", 3/8" Point of Use Pressure Regulator |
Maximum inlet pressure | 5.0MPa | |||||||
| Outlet pressure range | 1.0MPa with -0.1~1.5Mpa gauge | |||||||||
| 0.7MPa with -0.1~1.0Mpa gauge | ||||||||||
| 0.4MPa with -0.1~0.6Mpa gauge | ||||||||||
| 0.2MPa with -0.1~0.3Mpa gauge | ||||||||||
| Flow rates | 300~450L/min(nor) | |||||||||
| TORR‐50 series 1/2" Point of Use Pressure Regulator |
Maximum inlet pressure | 3.5MPa | ||||||||
| Outlet pressure range | 1.0MPa with -0.1~1.5Mpa gauge | |||||||||
| 0.6MPa with -0.1~1.0Mpa gauge | ||||||||||
| 0.4MPa with -0.1~0.6Mpa gauge | ||||||||||
| 0.2MPa with -0.1~0.3Mpa gauge | ||||||||||
| Flow rates | 400~800L/min(nor) | |||||||||
| TORR‐50 series 3/4" Point of Use and Hi-Flow Pressure Regulator |
Maximum inlet pressure | 2.0MPa | ||||||||
| Outlet pressure range | 0.6MPa with -0.1~1.0Mpa gauge | |||||||||
| 0.4MPa with -0.1~0.6Mpa gauge | ||||||||||
| 0.2MPa with -0.1~0.3Mpa gauge | ||||||||||
| Flow rates | 600~1200L/min(nor) | |||||||||
| TORR‐150 series 3/4", 1 Point of Use and Hi-Flow Pressure Regulator |
Maximum inlet pressure | 2.0MPa | ||||||||
| Outlet pressure range | 0.6MPa with -0.1~1.0Mpa gauge | |||||||||
| 0.4MPa with -0.1~0.6Mpa gauge | ||||||||||
| 0.2MPa with -0.1~0.3Mpa gauge | ||||||||||
| Flow rates | 1000～2400L/min(nor) | |||||||||
| TORR‐350 series Point of Use and Ultra Hi-Flow Pressure Regulator |
Maximum inlet pressure | 1.5MPa | ||||||||
| Outlet pressure range | 0.6MPa with -0.1~1.0Mpa gauge | |||||||||
| 0.4MPa with -0.1~0.6Mpa gauge | ||||||||||
| 0.2MPa with -0.1~0.3Mpa gauge | ||||||||||
| Flow rates | 120～180m3/ｈ(nor) | |||||||||
| TORR‐800 series Point of Use and Ultra Hi-Flow Pressure Regulator |
Maximum inlet pressure | 1.0MPa | ||||||||
| Outlet pressure range | 0.6MPa | |||||||||
| Flow rates | 280～650m3/ｈ(nor) | |||||||||
| ＥＰ | S-TORRⅡ-02iF series IGS Pressure Regulator |
Maximum inlet pressure | 1.0MPa | |||||||
| Outlet pressure range | 0.4MPa specification | |||||||||
| Flow rates | 40L/min（nor） | |||||||||
| S-TORRⅢ-30 series 1/2" Point of Use Pressure Regulator |
Maximum inlet pressure | 1.5MPa | ||||||||
| Outlet pressure range | －0.1～1.0MPa計付 0.6MPa | |||||||||
| －0.1～0.6MPa計付 0.4MPa | ||||||||||
| －0.1～0.3MPa計付 0.2MPa | ||||||||||
| Flow rates | 50～90L/min（nor） | |||||||||
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S-TORRⅢ-50 series
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Maximum inlet pressure | 1.5MPa | ||||||||
| Outlet pressure range | 0.6MPa with -0.1~1.0Mpa gauge | |||||||||
| 0.4MPa with -0.1~0.6Mpa gauge | ||||||||||
| 0.2MPa with -0.1~0.3Mpa gauge | ||||||||||
| Flow rates | 300~400L/min(nor) | |||||||||
For inlet high-pressure gases
| BA | TORR-1300 series Standard model as Cylinder Cabinet Pressure Regulator |
Maximum inlet pressure | 15MPa | |||||||
| Outlet pressure range | 1.0MPa with -0.1~1.5Mpa gauge | |||||||||
| 0.6MPa with -0.1~1.0Mpa gauge | ||||||||||
| 0.4MPa with -0.1~0.6Mpa gauge | ||||||||||
| 0.2MPa with -0.1~0.3Mpa gauge | ||||||||||
| Flow rates | 80~250L/min（nor） | |||||||||
| TORR-2300 series 1/4" & 3/8" Cylinder Cabinet Pressure Regulator |
Maximum inlet pressure | 15MPa with 0~25Mpa gauge | ||||||||
| 20MPa with 0~35Mpa gauge | ||||||||||
| Outlet pressure range | 1.0MPa with -0.1~1.5Mpa gauge | |||||||||
| 0.6MPa with -0.1~1.0Mpa gauge | ||||||||||
| 0.4MPa with -0.1~0.6Mpa gauge | ||||||||||
| 0.2MPa with -0.1~0.3Mpa gauge | ||||||||||
| Flow rates | 350~1400L/min（nor） | |||||||||
| TORR-2500 series Cylinder Cabinet and Hi-Flow Pressure Regulator |
Maximum inlet pressure | 15MPa | ||||||||
| Outlet pressure range | 1.0MPa with -0.1~1.5Mpa gauge | |||||||||
| 0.6MPa with -0.1~1.0Mpa gauge | ||||||||||
| 0.4MPa with -0.1~0.6Mpa gauge | ||||||||||
| 0.2MPa with -0.1~0.3Mpa gauge | ||||||||||
| Flow rates | 90m3/ｈ(nor) | |||||||||
| TORR-3300 series Cylinder Cabinet and Ultra Hi-Flow Pressure Regulator |
Maximum inlet pressure | 20.0MPa | ||||||||
| Outlet pressure range | 1.0MPa with -0.1~1.5Mpa gauge | |||||||||
| Flow rates | 120m3/ｈ(nor) | |||||||||
| EP | S-TORRⅡ-1300 series 1/4" Cylinder Cabinet Pressure Regulator |
Maximum inlet pressure | 15.0MPa | |||||||
| Outlet pressure range | 1.0MPa with -0.1~1.5Mpa gauge | |||||||||
| 0.6MPa with -0.1~1.0Mpa gauge | ||||||||||
| 0.4MPa with -0.1~0.6Mpa gauge | ||||||||||
| 0.2MPa with -0.1~0.3Mpa gauge | ||||||||||
| Flow rates | 40~80L/min(nor) | |||||||||
| S-TORRⅡ-2300 series 1/4" & 3/8" Cylinder Cabinet Pressure Regulator |
Maximum inlet pressure | 15MPa | ||||||||
| Outlet pressure range | 1.0MPa with -0.1~1.5Mpa gauge | |||||||||
| 0.6MPa with -0.1~1.0Mpa gauge | ||||||||||
| 0.4MPa with -0.1~0.6Mpa gauge | ||||||||||
| 0.2MPa with -0.1~0.3Mpa gauge | ||||||||||
| Flow rates | 100~400L/min(nor) | |||||||||
For outlet high-pressure gases
| BA | TORR-H series High Pressure Regulator |
Maximum inlet pressure | 15MPa with 0~25Mpa gauge | |||||||
| 20MPa with 0~35Mpa gauge | ||||||||||
| Outlet pressure range | 12MPa with 0~20Mpa gauge | |||||||||
| 6MPa with 0~10Mpa gauge | ||||||||||
| 3MPa with 0~5Mpa gauge | ||||||||||
| Flow rates | 330~800L/min(nor) | |||||||||
For corrosive gases
| BA | TORR-2800SH series Corrovsive gas and Hi-Flow Pressure Regulator |
Maximum inlet pressure | 15.0MPa | |||||||
| Outlet pressure range | 1.0MPa with -0.1~1.5Mpa gauge | |||||||||
| 0.6MPa with -0.1~1.0Mpa gauge | ||||||||||
| 0.4MPa with -0.1~0.6Mpa gauge | ||||||||||
| 0.2MPa with -0.1~0.3Mpa gauge | ||||||||||
| Flow rates | 220~1400L/min(nor) | |||||||||
For vacuum pressure
| EP | S-TORRⅢ-A10 series 1/4" point of use and Cylinder Cabinet Vacuum Pressure Regulator |
Maximum inlet pressure | 1.0MPa | |||||||
| Outlet pressure range | 0.2MPa with -0.1~0.3Mpa gauge | |||||||||
| Flow rates | 4~15L/min(nor) | |||||||||
For liquid gases
| BA | TORR-2800 series Liquid gases and Hi-Flow Regulator |
Maximum inlet pressure | 15.0MPa | |||||||
| Outlet pressure range | 1.0MPa with -0.1~1.5Mpa gauge | |||||||||
| 0.6MPa with -0.1~1.0Mpa gauge | ||||||||||
| 0.4MPa with -0.1~0.6Mpa gauge | ||||||||||
| 0.2MPa with -0.1~0.3Mpa gauge | ||||||||||
| Flow rates | 220~1400L/min(nor) | |||||||||
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