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Equipment for Semiconductor use

High purity regulator

High purity regulator

A variety of models from high pressure to very low pressure and for semiconductor and LCD gases.

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[Model Line-up]

47a.jpgTORR Regulator

Models applying high-corrosion-resistance alloy, Ni-Cr-Mo alloy (Hastelloy) to primary metallic parts contacting with gas are available for use in corrosive gases.

S-TORR Regulator

This is a model for super high-purity gas piping use, securing gas purity retaining performance and safety to the utmost limit. Models for special uses are available, such as models for strong corrosive gas, negative pressure control, and tied diaphragm type.

For inlet low-pressure gases
BA TORR‐30 series
1/4", 3/8" Point of Use Pressure Regulator
Maximum inlet pressure 5.0MPa
Outlet pressure range 1.0MPa with -0.1~1.5Mpa gauge
0.7MPa with -0.1~1.0Mpa gauge
0.4MPa with -0.1~0.6Mpa gauge
0.2MPa with -0.1~0.3Mpa gauge
Flow rates 300~450L/min(nor)
TORR‐50 series
1/2" Point of Use Pressure Regulator
Maximum inlet pressure 3.5MPa
Outlet pressure range 1.0MPa with -0.1~1.5Mpa gauge
0.6MPa with -0.1~1.0Mpa gauge
0.4MPa with -0.1~0.6Mpa gauge
0.2MPa with -0.1~0.3Mpa gauge
Flow rates 400~800L/min(nor)
TORR‐50 series
3/4" Point of Use and Hi-Flow Pressure Regulator
Maximum inlet pressure 2.0MPa
Outlet pressure range 0.6MPa with -0.1~1.0Mpa gauge
0.4MPa with -0.1~0.6Mpa gauge
0.2MPa with -0.1~0.3Mpa gauge
Flow rates 600~1200L/min(nor)
TORR‐150 series
3/4", 1 Point of Use and Hi-Flow Pressure Regulator
Maximum inlet pressure 2.0MPa
Outlet pressure range 0.6MPa with -0.1~1.0Mpa gauge
0.4MPa with -0.1~0.6Mpa gauge
0.2MPa with -0.1~0.3Mpa gauge
Flow rates 1000~2400L/min(nor)
TORR‐350 series
Point of Use and Ultra Hi-Flow Pressure Regulator
Maximum inlet pressure 1.5MPa
Outlet pressure range 0.6MPa with -0.1~1.0Mpa gauge
0.4MPa with -0.1~0.6Mpa gauge
0.2MPa with -0.1~0.3Mpa gauge
Flow rates 120~180m3/h(nor)
TORR‐800 series
Point of Use and Ultra Hi-Flow Pressure Regulator
Maximum inlet pressure 1.0MPa
Outlet pressure range 0.6MPa
Flow rates 280~650m3/h(nor)
EP S-TORRⅡ-02iF series
IGS Pressure Regulator
Maximum inlet pressure 1.0MPa
Outlet pressure range 0.4MPa specification
Flow rates 40L/min(nor)
S-TORRⅢ-30 series
1/2" Point of Use Pressure Regulator
Maximum inlet pressure 1.5MPa
Outlet pressure range -0.1~1.0MPa計付 0.6MPa
-0.1~0.6MPa計付 0.4MPa
-0.1~0.3MPa計付 0.2MPa
Flow rates 50~90L/min(nor)

S-TORRⅢ-50 series
3/8," 1/2" Point of Use Pressure Regulator

 

Maximum inlet pressure 1.5MPa
Outlet pressure range 0.6MPa with -0.1~1.0Mpa gauge
0.4MPa with -0.1~0.6Mpa gauge
0.2MPa with -0.1~0.3Mpa gauge
Flow rates 300~400L/min(nor)
For inlet high-pressure gases
BA TORR-1300 series
Standard model as Cylinder Cabinet Pressure Regulator
Maximum inlet pressure 15MPa
Outlet pressure range 1.0MPa with -0.1~1.5Mpa gauge
0.6MPa with -0.1~1.0Mpa gauge
0.4MPa with -0.1~0.6Mpa gauge
0.2MPa with -0.1~0.3Mpa gauge
Flow rates   80~250L/min(nor)
TORR-2300 series
1/4" & 3/8" Cylinder Cabinet Pressure Regulator
Maximum inlet pressure 15MPa with 0~25Mpa gauge
20MPa with 0~35Mpa gauge
Outlet pressure range 1.0MPa with -0.1~1.5Mpa gauge
0.6MPa with -0.1~1.0Mpa gauge
0.4MPa with -0.1~0.6Mpa gauge
0.2MPa with -0.1~0.3Mpa gauge
Flow rates   350~1400L/min(nor)
TORR-2500 series
Cylinder Cabinet and Hi-Flow Pressure Regulator
Maximum inlet pressure 15MPa
Outlet pressure range 1.0MPa with -0.1~1.5Mpa gauge
0.6MPa with -0.1~1.0Mpa gauge
0.4MPa with -0.1~0.6Mpa gauge
0.2MPa with -0.1~0.3Mpa gauge
Flow rates   90m3/h(nor)
TORR-3300 series
Cylinder Cabinet and Ultra Hi-Flow Pressure Regulator
Maximum inlet pressure 20.0MPa
Outlet pressure range 1.0MPa with -0.1~1.5Mpa gauge
Flow rates   120m3/h(nor)
EP S-TORRⅡ-1300 series
1/4" Cylinder Cabinet Pressure Regulator
Maximum inlet pressure 15.0MPa
Outlet pressure range 1.0MPa with -0.1~1.5Mpa gauge
0.6MPa with -0.1~1.0Mpa gauge
0.4MPa with -0.1~0.6Mpa gauge
0.2MPa with -0.1~0.3Mpa gauge
Flow rates   40~80L/min(nor)
S-TORRⅡ-2300 series
1/4" & 3/8" Cylinder Cabinet Pressure Regulator
Maximum inlet pressure 15MPa
Outlet pressure range 1.0MPa with -0.1~1.5Mpa gauge
0.6MPa with -0.1~1.0Mpa gauge
0.4MPa with -0.1~0.6Mpa gauge
0.2MPa with -0.1~0.3Mpa gauge
Flow rates   100~400L/min(nor)
For outlet high-pressure gases
BA TORR-H series
High Pressure Regulator
Maximum inlet pressure 15MPa with 0~25Mpa gauge
20MPa with 0~35Mpa gauge
Outlet pressure range 12MPa with 0~20Mpa gauge
6MPa with 0~10Mpa gauge
3MPa with 0~5Mpa gauge
Flow rates 330~800L/min(nor)

 

For corrosive gases
BA TORR-2800SH series
Corrovsive gas and Hi-Flow Pressure Regulator
Maximum inlet pressure 15.0MPa
Outlet pressure range 1.0MPa with -0.1~1.5Mpa gauge
0.6MPa with -0.1~1.0Mpa gauge
0.4MPa with -0.1~0.6Mpa gauge
0.2MPa with -0.1~0.3Mpa gauge
Flow rates 220~1400L/min(nor)
For vacuum pressure
EP S-TORRⅢ-A10 series
1/4" point of use and Cylinder Cabinet Vacuum Pressure Regulator
Maximum inlet pressure 1.0MPa
Outlet pressure range 0.2MPa with -0.1~0.3Mpa gauge
Flow rates 4~15L/min(nor)

 

For liquid gases
BA TORR-2800 series
Liquid gases and Hi-Flow Regulator
Maximum inlet pressure 15.0MPa
Outlet pressure range 1.0MPa with -0.1~1.5Mpa gauge
0.6MPa with -0.1~1.0Mpa gauge
0.4MPa with -0.1~0.6Mpa gauge
0.2MPa with -0.1~0.3Mpa gauge
Flow rates 220~1400L/min(nor)
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