Equipment for Semiconductor use

Filter

Filter

Suitable for electronics material gases. A variety of models for high precision and light weight and from high pressure to low pressure.

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Features

Hi-Precision50a.jpg
Material : SUS316L for TLF Series, SUS316 for SHF series
TLF series uses Teflon PTFE Membrane for element and catch smaller particle by propornation of hole diameter.

Leakage
Guaranteed He-leak less than 1.3×10－10Pa・m3/sec by welded connections.

Surfece Finish
Internal surface polishing is standard for TLF series.

Small size and light weight
Saving the piping space.

Application

Suitable for electronics material gases and analysis gases required high purity and ultra clean gas line

Specification

Low pressure line filter

Model Connection Material particle size　　　　　　(μm) Flowrates Maximum using Pressure (Mpa)
Body Element Inlet pressure 0.1MPa Inlet pressure 0.3MPa
TLF-S4 1/4”SL SUS316L Teflon Membrane 0.01 10L/min(nor) 25L/min(nor) 0.97
TLF-V4 1/4”VCR

High pressure line filter

Model Connection Material particle size　　　　　　　　μm Flowrates Maximum using Pressure (Mpa)
Body Element Inlet pressure 0.1MPa Inlet pressure 0.3MPa
SHF-S4 1/4”SL SUS316 SUS316 2 20m3/h(nor) 40m3/h(nor) 15
SHF-V4 1/4”VCR

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